C-V characteristics of SiO2 thin films prepared by sol-gel method

Proceedings - International Symposium on Electrets

Volumn , Issue , 1996, Pages 706-709

  Liu, Yun ^a   Zhai, Jiwei ^a   Ying, Mingzi ^a   Zhang, Liangying ^a   Yao, Xi ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; FILM PREPARATION; IONS; MOS DEVICES; POROSITY; SILICA; SOL-GELS; THERMAL CONDUCTIVITY;

CAPACITANCE VOLTAGE CHARACTERISTICS; MOBILE IONS; TETRAETHYL ORTHOSILICATE;

THIN FILMS;

EID: 0030421358     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)