An electrostatically-driven phase change actuator for vibration control

American Society of Mechanical Engineers, Design Engineering Division (Publication) DE

Volumn 93, Issue , 1996, Pages 289-295

  Hallinan, Kevin P ^a   Kashani, A Reza ^a   Bartsch, Michael ^a  

^a University of Dayton   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIELECTRIC FILMS; ELECTRIC FIELDS; ELECTROSTATICS; POLARIZATION; VAPOR PRESSURE; VIBRATION CONTROL;

ELECTROSTATICALLY DRIVEN PHASE CHARGE ACTUATOR; LIQUID FILM;

ACTUATORS;

EID: 0030421154     PISSN: 15214613     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (8)

1. Bergstrom, P. L, Ji, J., Liu, Y., Kaviany, M. and Wise, K. D., "Thermally Driven Phase-Change," J. of Microelectromechanical Systems, Vol. 4., No. 1, pp. 10-17.
2. Brown, J. R. , Hallinan, K. P., Chebaro, H. C., and Chang, W. S., 1994, "Evaporation from Curved Thin Liquid Films," presented at the 1994 National Heat Transfer Conference, Atlanta, GA.
3. Israelachvili, J.N., 1989, {\em Intermolecular and Surface Forces, With Applications to Colloidal and Biological Systems}, Academic Press, New York.
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5. Michler, J. R., Moon, K. S., Sutherland, J. W., and Kashani, A. R, 1993, "Development of a Cutting Tool Micropositioner Using Giant Magnetostriction," accepted for publication in Transaction of the North American Manufacturing Reseearch Institute/SME.
6. Riethmuller, W., Benecke, W., Schnakenber, U., and Heuberger, A., "Micromechanical Silicon Actuators Based on Thermal Expansion Effects," in Dig. Int. Conf. Solid-State Sensors and Actuators, Tokyo, Japan, June 19988, pp. 834-837.
7. Schrage, R. W., 1953, A Theorectical Study of Interphase Mass Transfer, Columbia University Press, New York.
8. Zdeblick, M. J. and Angell, J. B., "A Microminiature Electric-to-fluidic Valve," in Dig. Int. Conf. Solid-State Sensors and Actuators, Tokyo, Japan, June 19988, pp. 827-829.