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Volumn 132, Issue 5-6, 1996, Pages 437-441
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An integrated silicon ARROW Mach-Zehnder interferometer for sensing applications
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Author keywords
ARROW guides; Integrated sensors; Mach Zehnder interferometer
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Indexed keywords
FINITE DIFFERENCE METHOD;
INTEGRATED CIRCUIT MANUFACTURE;
INTEGRATED OPTICS;
LIGHT INTERFERENCE;
LIQUIDS;
OPTICAL MULTILAYERS;
OPTICAL SENSORS;
OPTICAL WAVEGUIDES;
REFRACTIVE INDEX;
SEMICONDUCTING SILICON;
ANTIRESONANT REFLECTING OPTICAL WAVEGUIDE;
INTEGRATED SENSORS;
MACH-ZEHNDER INTERFEROMETER;
SILICON PROCESSING TECHNOLOGY;
INTERFEROMETERS;
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EID: 0030420801
PISSN: 00304018
EISSN: None
Source Type: Journal
DOI: 10.1016/0030-4018(96)00387-2 Document Type: Article |
Times cited : (15)
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References (9)
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