Scale-up of the nitridation and sintering of silicon preforms using microwave heating

Materials Research Society Symposium - Proceedings

Volumn 430, Issue , 1996, Pages 3-8

  Kiggans Jr , J O ^a   Tiegs, T N ^a   Davisson, C C ^a   Morrow, M S ^a   Garvey, G J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); INDUSTRIAL FURNACES; SILICON NITRIDE; SINTERING;

NITRIDATION; RESISTANCE HEATED FURNACES; SILICON PREFORMS; SINTERED REACTION BONDED SILICON NITRIDE;

MICROWAVE HEATING;

EID: 0030420724     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-430-3     Document Type: Conference Paper

References (18)