Sampling-based yield prediction for ULSI

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2874, Issue , 1996, Pages 198-209

  Allan, Gerard A ^a   Walton, Anthony J ^a  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

STATE-OF-THE-ART; YIELD PREDICTIONS;

DESIGN; EFFICIENCY; ESTIMATION; SAMPLING;

ULSI CIRCUITS;

EID: 0030420677     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)