Structural stability of Si-O-a-C:H/Si-a-C:H layered systems

Materials Research Society Symposium - Proceedings

Volumn 434, Issue , 1996, Pages 113-118

  Muller, U ^a   Hauert, R ^a  

^a SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ADHESION; ANNEALING; CARBON; COMPOSITION EFFECTS; ELECTRIC INSULATION; HARDNESS; HYDROGENATION; PROTECTIVE COATINGS; RAMAN SPECTROSCOPY; THERMODYNAMIC STABILITY; TRANSPARENCY;

CHEMICAL INERTNESS; HEXAMETHYLDISILOXANE; TETRAMETHYLSILANE;

AMORPHOUS FILMS;

EID: 0030420663     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-434-113     Document Type: Conference Paper

References (13)