Comparative analysis of run-to-run control algorithms in the semiconductor manufacturing industry

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 375-381

  Ning, Zhe ^a   Moyne, James R ^a   Smith, Taber ^a   Boning, Duane ^a   Del Castillo, Enrique ^a   Yeh, Jinn Yi ^a   Hurwitz, Arnon ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; INDUSTRY; KNOWLEDGE BASED SYSTEMS; OPTIMIZATION; PROCESS CONTROL; QUALITY CONTROL; STABILITY; STANDARDS; TESTING;

COMPARATIVE ANALYSIS; KNOWLEDGE BASED INTERACTIVE RUN TO RUN CONTROLLER; OPTIMIZING ADAPTIVE QUALITY CONTROLLER; SEMICONDUCTOR MANUFACTURING INDUSTRY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030420619     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)