In-line electrical probe for CD metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2876, Issue , 1996, Pages 135-146

  Chain, Elizabeth E ^a   Griswold, Mark D ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL DIMENSION METROLOGY; IN-LINE ELECTRICAL PROBES;

CHARACTERIZATION; DATA ACQUISITION; DISTANCE MEASUREMENT; MOS DEVICES; PROCESS CONTROL; SCANNING ELECTRON MICROSCOPY;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030418495     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)