Tetrahedral amorphous carbon thin film transistors

Materials Research Society Symposium - Proceedings

Volumn 423, Issue , 1996, Pages 39-43

  Clough, F J ^a   Kleinsorge, B ^a   Milne, W I ^a   Robertson, J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; SEMICONDUCTOR DEVICE MANUFACTURE;

FILTERED CATHODIC VACUUM ARC (FVAC) TECHNIQUE;

THIN FILM TRANSISTORS;

EID: 0030416899     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-423-39     Document Type: Conference Paper

References (9)