Integrated micro endeffector for dexterous micromanipulation

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1996, Pages 149-156

  Arai, Fumihito ^a   Fukuda, Toshio ^a   Iwata, Hitoshi ^a   Itoigawa, Kouichi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; ELECTROSTATICS; FORCE MEASUREMENT; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; PHYSICAL CHEMISTRY; SENSORS; STRAIN GAGES; SURFACE ROUGHNESS; SURFACE TENSION; VAN DER WAALS FORCES;

ADHESIVE FORCES; DEXTEROUS MICROMANIPULATION; ELECTROSTATIC FORCE; INTEGRATED MICRO ENDEFFECTOR; MICRO PYRAMIDS; SURFACE TENSION FORCE;

END EFFECTORS;

EID: 0030416695     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)