10 GHz-range surface acoustic wave inter-digital transducers and low loss filters using anodic oxidation technology

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1996, Pages 261-265

  Yamanouchi, K ^a   Wagatsuma, Y ^a   Aoki, K ^a   Tsuji, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ANODIC OXIDATION; BANDWIDTH; MOBILE TELECOMMUNICATION SYSTEMS; PHOTOLITHOGRAPHY;

LOW LOSS FILTERS; NARROW GAP INTERDIGITAL TRANSDUCERS; SURFACE ACOUSTIC WAVE INTERDIGITAL TRANSDUCERS;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 0030415879     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)