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Volumn , Issue , 1996, Pages 689-692

Surface segregation as a means of gettering Cu in liquid-phase-epitaxy silicon thin layers grown from Al-Cu-Si solutions

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPPER; LIQUID PHASE EPITAXY; SECONDARY ION MASS SPECTROMETRY; SUBSTRATES; SURFACE PHENOMENA; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0030415267     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/pvsc.1996.564223     Document Type: Conference Paper
Times cited : (2)

References (4)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.