Characterization and in-line control of UV-transparent silicon nitride films for passivation of FLASH devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2876, Issue , 1996, Pages 63-70

  Zheng, Jia Zhen ^a   Tan, Denise ^a   Chew, Peter ^a   Chan, Lap ^a  

^a Chartered Semiconductor   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FLASH DEVICES; ULTRAVIOLET TRANSMITTANCE;

CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; INTEGRATED CIRCUIT MANUFACTURE; PASSIVATION; PROCESS CONTROL; QUALITY ASSURANCE; REFRACTIVE INDEX; SEMICONDUCTING FILMS; STRESSES; ULTRAVIOLET RADIATION;

SILICON NITRIDE;

EID: 0030415126     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)