Accurate prediction of kill ratios based on KLA defect inspection and critical area analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2874, Issue , 1996, Pages 75-84

  Elias, Akiva ^a   Strojwas, Andrzej J ^a   Maly, Wojciech P ^a   Nurani, Raman ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

KILL RATIOS; KLA DEFECT INSPECTION;

DEFECTS; INSPECTION; MICROCOMPUTERS; PROCESS CONTROL; QUALITY CONTROL; RANDOM ACCESS STORAGE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; VLSI CIRCUITS;

MICROELECTRONICS;

EID: 0030414834     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)