Production use of an integrated automatic defect classification (ADC) system operating in a laser confocal/white light imaging defect review station

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 107-111

  Li, Jeffrey ^a   McIntyre, Michael ^a   Lee, Ken ^a   Worster, Bruce ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CALIBRATION; DEFECTS; IMAGE PROCESSING; IMAGING TECHNIQUES; LOGIC CIRCUITS; ONLINE SYSTEMS; OPTICAL DEVICES; SILICON WAFERS;

CONFOCAL IMAGING; INTEGRATED AUTOMATIC DEFECT CLASSIFICATION SYSTEM; LASER CONFOCAL DEFECT; MECHANICAL COMPONENTS; ONLINE TOOLS; SYSTEM CALIBRATION; WAFER FAB; WHITE LIGHT IMAGING DEFECT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030414788     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)