Automatic classification of wafer defects: Status and industry needs

Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 1996, Pages 117-122

  Shapiro, Arye ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED MANUFACTURING; COMPUTER SOFTWARE; CRYSTAL DEFECTS; INSPECTION; MICROSCOPES; OPTICAL MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE;

AUTOMATIC DEFECT CLASSIFICATION (ADC); WAFER DEFECTS;

WSI CIRCUITS;

EID: 0030414637     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)