Porous silicon ethanol vapor sensor

Proceedings of the IEEE Hong Kong Electron Devices Meeting

Volumn , Issue , 1996, Pages 13-14

  Bow, Y C ^a   Kwok, W M ^a   Poon, M C ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; ETHANOL; FABRICATION; OPTICAL MICROSCOPY; POROUS SILICON; PRODUCT DESIGN; SENSITIVITY ANALYSIS; SILICON WAFERS; VAPORS;

ETHANOL VAPOR SENSOR; ETHANOL VAPORS;

CHEMICAL SENSORS;

EID: 0030413877     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)