Influence of PbTiO3 buffer layers on microstructural properties of Pb(Zr,Ti)O3 films deposited by sputtering

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 291-296

  Cattan, E ^a   Roma, R ^a   Velu, G ^a   Jaber, B ^a   Remiens, D ^a   Thierry, B ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; FILM GROWTH; LATTICE CONSTANTS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; NUCLEATION; PERMITTIVITY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

BUFFER LAYERS; RADIOFREQUENCY MAGNETRON SPUTTERING;

FERROELECTRIC MATERIALS;

EID: 0030413721     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-291     Document Type: Conference Paper

References (9)