Integration of target manufacturing in the sputtering plant

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1996, Pages 424-430

  Lippens, P ^a  

^a Innovative Sputtering Technology   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

HOT ISOSTATIC PRESSING; INDIUM METALLURGY; MAGNETIC MATERIALS;

INDIUM TIN OXIDES; SPUTTER TARGETS; SPUTTERING PLANTS;

SPUTTER DEPOSITION;

EID: 0030413316     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)