Source drain leakage: a potential problem in submicron CMOS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2874, Issue , 1996, Pages 232-237

  Hong, Yeoh E ^a   Keshavarzi, Ali ^a   Tay, Martin T ^a  

^a Intel Technology Malaysia Sdn Bhd   (Malaysia)

Author keywords

[No Author keywords available]

Indexed keywords

FAULT ISOLATION; SOURCE DRAIN LEAKAGE; SUBMICRON DEVICES;

ELECTRIC PROPERTIES; FAILURE ANALYSIS; MICROELECTRONICS; SEMICONDUCTING SILICON;

CMOS INTEGRATED CIRCUITS;

EID: 0030413111     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)