A-Si:H solar cells deposited using VHF-PECVD

Materials Research Society Symposium - Proceedings

Volumn 420, Issue , 1996, Pages 21-25

  van Sark, W G J H M ^a   Bezemer, J ^a   van der Heijden, R ^a   van der Weg, W F ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; ENERGY EFFICIENCY; HYDROGENATION; PLASMA APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS;

AMORPHOUS HYDROGENATED SILICON SOLAR CELLS; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION;

SILICON SOLAR CELLS;

EID: 0030412975     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)