Radio-frequency induction heating for semiconductor crystal growth from a crucible

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volumn 323, Issue 1, 1996, Pages 309-313

  Ma, Nancy ^a   Anselmo, Andrew P ^a   Bliss, David F ^a   Walker, John S ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRUCIBLES; CRYSTALS; ELECTRIC CURRENTS; HEAT FLUX; INTEGRAL EQUATIONS; MAGNETIC FIELD EFFECTS; SEMICONDUCTOR GROWTH;

BOUNDARY INTEGRAL METHOD; JOULEAN HEATING; SUSCEPTOR;

INDUCTION HEATING;

EID: 0030412741     PISSN: 02725673     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)