Novel optical probing system with submicron spatial resolution for internal diagnosis of VLSI circuits

IEEE International Test Conference (TC)

Volumn , Issue , 1996, Pages 269-275

  Ozaki, K ^a   Sekiguchi, H ^a   Wakana, S ^a   Goto, Y ^a   Umehara, Y ^a   Matsumoto, J ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTROOPTICAL EFFECTS; OPTICAL RESOLVING POWER; SCANNING ELECTRON MICROSCOPY; VLSI CIRCUITS; WAVEFORM ANALYSIS;

ELECTRON BEAM TESTER; OPTICAL PROBING SYSTEM; SUBMICRON SPATIAL RESOLUTION;

INTEGRATED CIRCUIT TESTING;

EID: 0030412069     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)