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Volumn 434, Issue , 1996, Pages 47-55
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Reactive sputter deposition of superhard polycrystalline nanolayered coatings
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT DENSITY;
ELECTRODEPOSITION;
HARDNESS;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
POLYCRYSTALLINE MATERIALS;
SPUTTER DEPOSITION;
STOICHIOMETRY;
TITANIUM NITRIDE;
PULSED DIRECT CURRENT;
TARGET POWER;
SUPERLATTICES;
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EID: 0030411870
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-434-47 Document Type: Conference Paper |
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Times cited : (9)
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References (18)
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