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Volumn 436, Issue , 1996, Pages
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Simultaneous overall and local stress analysis of thin metal films by light scattering and beam deflection measurements
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
HEATING;
LASER BEAM EFFECTS;
LIGHT SCATTERING;
OPTICAL INSTRUMENTS;
OPTICAL VARIABLES MEASUREMENT;
REAL TIME SYSTEMS;
STRESS ANALYSIS;
STRESS RELAXATION;
THIN FILMS;
HILLOCK FORMATION;
LASER BEAM DEFLECTION;
REAL TIME OVERALL STRESS;
STRESS RELAXATION MEASUREMENT;
METALLIC FILMS;
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EID: 0030411687
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-436-257 Document Type: Conference Review |
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Times cited : (2)
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References (8)
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