Improved nickel silicide ohmic contacts to n-type 4H and 6H-SiC using nichrome

Materials Research Society Symposium - Proceedings

Volumn 423, Issue , 1996, Pages 119-124

  Luckowski, E D ^a   Williams, J R ^a   Bozack, M J ^a   Isaacs Smith, T ^a   Crofton, J ^a  

^a AUBURN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; GOLD; NICKEL ALLOYS; NICKEL COMPOUNDS; SILICON CARBIDE; THERMAL EFFECTS;

GOLD SILVER CAPS; NICHROME; NICKEL SILICIDES;

OHMIC CONTACTS;

EID: 0030409787     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-423-119     Document Type: Conference Paper

References (8)