Thin P-type microcrystalline silicon film on various substrates

Materials Research Society Symposium - Proceedings

Volumn 420, Issue , 1996, Pages 271-276

  Rath, J K ^a   Wallinga, J ^a   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; THIN FILMS; TUNNEL JUNCTIONS;

BLUE SPECTRAL RESPONSE; MICROCRYSTALLINE SILICON; SUPERSTRATE STRUCTURE; ULTRAVIOLET REFLECTANCE;

SEMICONDUCTING SILICON;

EID: 0030407608     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-420-271     Document Type: Conference Paper

References (8)