Hard amorphous hydrogenated carbon films deposited from an expanding thermal plasma

Materials Research Society Symposium - Proceedings

Volumn 436, Issue , 1996, Pages

  Gielen, J W A M ^a   Van De Sanden, M C M ^a   Kessels, W M M ^a   Schram, D C ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; ARGON; DEPOSITION; DIAMOND FILMS; DISSOCIATION; FILM GROWTH; HYDROGENATION; PLASMA APPLICATIONS; PLASMA SOURCES; PROBES;

CRITICAL LOADING; HARD AMORPHOUS HYDROGENATED CARBON FILMS; ION DENSITY; PROBE MEASUREMENTS; THERMAL PLASMA;

AMORPHOUS FILMS;

EID: 0030407269     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-436-287     Document Type: Conference Review

References (11)