Relationship between micropipes and screw dislocations in PVT grown 6H-SiC

Materials Research Society Symposium - Proceedings

Volumn 423, Issue , 1996, Pages 539-544

  Giocondi, Jennifer ^a   Rohrer, Gregory S ^a   Skowronski, Marek ^a   Balakrishna, V ^a   Augustine, G ^a   Hobgood, H M ^a   Hopkins, R H ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISLOCATIONS (CRYSTALS); SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; VAPOR PHASE EPITAXY; VECTORS;

BURGERS VECTORS; MICROPIPES; PHYSICAL VAPOR TRANSPORT; SCANNING FORCE MICROSCOPY;

SILICON CARBIDE;

EID: 0030407201     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-423-539     Document Type: Conference Paper

References (13)