Hollow-cathode activated EB evaporation for oxide coating of plastic films

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1996, Pages 446-450

  Neumann, M ^a   Morgner, H ^a   Straach, S ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CATHODES; COATINGS; ELECTRON BEAMS; EVAPORATION; HARDNESS; MICROSTRUCTURE; PLASMA APPLICATIONS; PLASMA SOURCES; PLASTIC FILMS;

HOLLOW CATHODES; PLASMA ACTIVATED EVAPORATION; REACTIVE DEPOSITION; THERMAL EVAPORATION; WEB COATINGS;

VAPOR DEPOSITION;

EID: 0030406822     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)