Fabrication of mm-wave undulator/linear accelerator cavities using deep x-ray lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 288-294

  Song, Joshua J ^a   Kang, Y W ^a   Kustom, R L ^a   Lai, Barry P ^a   Mancini, Derrick C ^a   Nassiri, A ^a   White, V ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAVITY RESONATORS; ELECTROPLATING; FABRICATION; MANUFACTURE; MASKS; MILLIMETER WAVES; MIRRORS; POLYMETHYL METHACRYLATES; SEMICONDUCTING SILICON; X RAY LITHOGRAPHY;

HARD X RAYS; NATIONAL SYNCHROTRON LIGHT SOURCE; UNDULATORS;

LINEAR ACCELERATORS;

EID: 0030406272     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250963     Document Type: Conference Paper

References (12)