Photodetection and optimization of high-resolution micro-optomechanical thermal sensors

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volumn 327, Issue , 1996, Pages 55-61

  Lai, J ^a   Perazzo, T ^a   Shi, Z ^a   Majumdar, A ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMIZATION; SENSORS; TEMPERATURE MEASUREMENT; THERMAL CONDUCTIVITY; THERMAL EXPANSION;

MOLECULAR LEVEL CONDENSATION; PHOTOTHERMAL DETECTION; SENSOR SENSITIVITY; SURFACE CATALYSIS; TEMPERATURE CHANGE; THERMAL SENSOR;

HEAT TRANSFER;

EID: 0030403990     PISSN: 02725673     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

1. Azar, K., Benson, J. R., and Manno, V. P., 1991, "Liquid Crystal Imaging for Temperature Measurment of Electronic Devices", IEEE 7th Annual Semiconductor Thermal Measurement & Management Symposium, pp. 23-29.
2. Barnes, J. R., Stephenson, S. J., Welland, M. E., Gerber, Ch., and Gimzewski, J. K., 1994a "Photothermal Spectroscopy with Femtojoule Sensitive Using a Micromechanical Device," Nature, Vol. 372, pp. 79-82.
3. Barnes, J. R., Stephenson, R. J., Woodburn, C. N., O'Shea, S. J., Welland, M. E., Rayment, T., Gimzewski, J. K., and Gerber, Ch., 1994b, "A Femtojoule Calorimeter Using Micromechanical Sensors," Review of Scientific Instruments, Vol. 65, pp. 3793-3798.
4. Doebelin, E. O., 1990, Measurement Systems : Application and Design, 4th ed., McGraw-Hill, New York.
5. Doran, S. J., Carpenter, T. A., and Hall, L. D., 1994, "Noninvasive measurement of temperature distributions with high spatial resolution using quantitative NMR relaxation times," Review of Scientific Instruments, Vol. 65, pp. 2231-2237.
6. Eskin, S. G. and Fritze, J. R., 1940, "Thermostatic Bimetals," Transactions of the ASME, Vol. 48, pp. 433-442.
7. Gimzewski, J. K., Gerber, Ch., Meyer, E., and Schlittler, R. R., 1994, "Observation of a chemical reaction using a micromechanical sensor," Chemical Physical Letters, Vol. 217, pp. 589-594.
8. Goodson, K., Kading, O. W., Rosler, M., and Zachai, R., 1995, "Experimental Investigation of Thermal Conduction Normal to Diamond-Silicon Boundaries," Journal of Applied Physics, Vol. 77, pp. 1385-1392.
9. Heng, S. and Black, W. Z., 1991, "Temperature Mapping of Localized Hot Spots on Microelectronic Chip Surfaces," ASME Journal of Electronic Packaging, Vol. 113, pp. 286-293.
10. Liu, K.-L. K., Davis, K. L., and Morris, M. D., 1994, "Raman Spectroscopic Measurement of Spatial and Temporal Temperature Gradients in Operating Electrophoresis Capillaries," Analytical Chemistry, Vol. 66, pp. 3744-3750.
11. Nakabeppu, O., Chandrachood, M., Wu, Y., Lai, J., and Majumdar, A., 1995, "Scanning Thermal Imaging Microscopy using composite cantilever probes," Applied Physics Letters, Vol. 66, pp. 694-696.
12. Ostermeir, R., Brunner, K., Abstreiter, G., and Weber, W., 1992, "Temperature Distribution in Si-MOSFETs Studied by Micro Raman Spectroscopy," IEEE Transaction on Electronic Devices, Vol. 39. pp. 858-863.
13. Qiu, T. Q., Grigoropoulos, C. P., and Tien, C. L., 1993, "Novel Technique for Noncontact and Microscale Temperature Measuremetns," Experimental Heat Transfer, Vol. 6, pp. 231-234.
14. Roark, R. J. and Young, W. C., 1972, Formulas for Stress and Strain, 5th ed. McGraw-Hill, New York.
15. Sarid, D., 1991, Scanning Force Microscopy with Application to Electric, Magnetic, and Atomic Forces, Oxford University Press, New York.
16. Spassov, L., Yankov, D. Y., Georgiev, V., Yossifov, E., and Vergov, L., 1995, "A Thermosenstitive Quartz Resonator with a Built-in Microheater as a Multipurpose Sensor," Review of Scientific Instruments, Vol. 66, pp. 168-170.
17. Thundat, T., Sharp, S. L., Fisher, W. G., Warmack, R. J., and Wachter, E. A., 1995, "Micromechanical Radiation Dosimeter," Applied Physics Letters, Vol. 66, pp. 1563-1565.
18. Valvano, J. W., 1992, "Temperature Measurments," Advances in Heat Transfer, Vol. 22, ed. Y. I. Cho, pp. 359-436,
19. Wachter, E. A. and Thundat, T., 1995, "Micromechanical Sensors for Chemical and Physical Measurements," Review of Scientific Instruments, Vol. 66, pp. 3662-3667.