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Volumn 169, Issue 3, 1996, Pages 598-599
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Effective segregation coefficient and steady state segregation coefficient of germanium in Czochralski silicon
a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL GROWTH FROM MELT;
DOPING (ADDITIVES);
GERMANIUM;
SEGREGATION (METALLOGRAPHY);
SILICON;
CZOCHRALSKI SILICON;
EFFECTIVE SEGREGATION COEFFICIENT;
STEADY STATE SEGREGATION COEFFICIENT;
SINGLE CRYSTALS;
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EID: 0030402441
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(96)00672-0 Document Type: Article |
Times cited : (8)
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References (7)
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