Linewidth control effects on MOSFET ESD robustness

Electrical Overstress/Electrostatic Discharge Symposium Proceedings

Volumn , Issue , 1996, Pages 101-109

  Voldman, S ^a   Never, J ^a   Holmes, S ^a   Adkisson, J ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTROSTATICS; FAILURE ANALYSIS; GATES (TRANSISTOR); SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING;

ELECTROSTATIC DISCHARGE ROBUSTNESS; LINEWIDTH CONTROL EFFECTS;

MOSFET DEVICES;

EID: 0030402059     PISSN: 07395159     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)