Thermal wave analysis of the formation of titanium disilicide on submicron lines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2877, Issue , 1996, Pages 80-86

  Brun, Alain ^a   Gerritsen, Eric ^a   Brun, Nicole ^a  

^a ORANGE LABS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

PATTERNED WAFERS; THERMAL WAVE IMAGING; TITANIUM DISILICIDE;

ANNEALING; CHARACTERIZATION; IMAGING TECHNIQUES; MICROELECTRONICS; NONDESTRUCTIVE EXAMINATION; THERMAL EFFECTS;

TITANIUM COMPOUNDS;

EID: 0030401238     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)