Analysis of pulsed excimer laser ablation of PZT, Pb and Ti in an oxygen ambient using energy dispersive mass spectrometry

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 225-230

  Coccia, L G ^a   Tyrrell, G C ^a   Boyd, I W ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; DEPOSITION; EXCIMER LASERS; LASER ABLATION; LEAD COMPOUNDS; MASS SPECTROMETRY; OXIDATION; PULSED LASER APPLICATIONS; THERMODYNAMICS; THIN FILMS;

ELECTROCERAMIC TARGETS; GAS PHASE OXIDATION; METALLIC TARGETS; REACTION CROSS SECTION;

FERROELECTRIC MATERIALS;

EID: 0030400712     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-225     Document Type: Conference Paper

References (20)