UV photoannealing and RTP of thin sol-gel films

Materials Research Society Symposium - Proceedings

Volumn 429, Issue , 1996, Pages 193-201

  Van de Leest, R E ^a   Roozeboom, F ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTS; IRON; IRRADIATION; NICKEL; SOL-GELS; TANTALUM; THIN FILMS; YTTRIUM;

ALKOXIDE PRECURSOR FILMS; EXCIMER LASER ANNEALING; OXIDE FILMS; PHOTOANNEALING; RAPID THERMAL PROCESSING; THIN SOL GEL FILMS;

ANNEALING;

EID: 0030400495     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)