Thermodynamics of hole and hillock growth in thin films

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 3-13

  Srolovitz, D J ^a   Yang, W ^a   Goldiner, M G ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GRAIN BOUNDARIES; MORPHOLOGY; RELAXATION PROCESSES; SURFACE TENSION; SURFACES; THERMOANALYSIS; THERMODYNAMICS; THIN FILMS; TRANSPORT PROPERTIES;

HILLOCK GROWTH; HILLOCKS; HOLE GROWTH; HOLES; SURFACE RELAXATION;

FILM GROWTH;

EID: 0030400337     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (27)