Preparation of microporous films with sub nanometer pores and their characterization using stress and FTIR measurements

Materials Research Society Symposium - Proceedings

Volumn 431, Issue , 1996, Pages 185-190

  Samuel, J ^a   Hurd, A J ^a   van Swol, F ^a   Frink, L J Douglas ^a   Brinker, C J ^a   Contakes, S C ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION ISOTHERMS; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NANOSTRUCTURED MATERIALS; POROSITY; PRESSURE EFFECTS; SOL-GELS; STRESS ANALYSIS; STRESS CONCENTRATION; SUBSTRATES; THIN FILMS;

MICROPOROUS FILMS; SOLVENT TEMPLATING; STRESS ISOTHERMS;

POROUS SILICON;

EID: 0030400178     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-431-185     Document Type: Conference Paper

References (16)