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Volumn 2, Issue , 1996, Pages 585-593
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Surface reactions of SF6 decomposition products
a a |
Author keywords
[No Author keywords available]
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Indexed keywords
GAS PHASE CONCENTRATION;
CORROSION PREVENTION;
DECOMPOSITION;
INFRARED SPECTROMETERS;
REACTION KINETICS;
STOICHIOMETRY;
SULFUR COMPOUNDS;
SURFACE TESTING;
ELECTRIC INSULATION;
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EID: 0030399760
PISSN: 00849162
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (12)
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