Thermopneumatical micropump and microvalves for a medical analyzing system

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 53-58

  Sbiaa, Zouhair ^a   Camon, H ^a   Esteve, Daniel ^a  

^a Fr   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSYSTEMS; MICROVALVES; THERMOPNEUMATICAL MICROPUMPS;

CHEMICAL ANALYSIS; CHEMICAL SENSORS; MEDICAL APPLICATIONS; PNEUMATICS; PRESSURE MEASUREMENT; PUMPS; TECHNOLOGY; VALVES (MECHANICAL);

MICROMACHINING;

EID: 0030399537     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)