|
|
|
Volumn 2880, Issue , 1996, Pages 2-11
|
|
Application of micromachining technology to optical devices and systems
a
|
|
Author keywords
[No Author keywords available]
|
|
Indexed keywords
ELECTROMECHANICAL DEVICES;
MOTION CONTROL;
OPTICAL DEVICES;
OPTICAL SYSTEMS;
TECHNOLOGY;
CONTROL SYSTEMS;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONICS;
INTEGRATED CIRCUITS;
FABRICATION;
INTEGRATED CIRCUIT MANUFACTURE;
MICROELECTROMECHANICAL SYSTEMS;
MINIATURIZATION;
MICROMACHINING;
MICRO-OPTICAL DEVICES;
MINIATURIZATION;
MULTIPLICITY;
MICROOPTICAL DEVICES;
|
|
EID: 0030399525
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
|
Times cited : (3)
|
|
References (60)
|
