Laser-induced damage studies in silicon and silicon-based photodetectors

Applied Optics

Volumn 35, Issue 36, 1996, Pages 7061-7065

  Arora, V K ^a   Dawar, A L ^a  

^a LASER SCIENCE AND TECHNOLOGY CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

AVALANCHE DIODES; CARRIER CONCENTRATION; FREQUENCIES; LASER BEAM EFFECTS; LEAKAGE CURRENTS; PHOTODIODES; SEMICONDUCTING SILICON; SINGLE CRYSTALS; THERMAL STRESS;

AVALANCHE PHOTODIODES; LASER INDUCED DAMAGE; LASER PULSE ENERGY; REPETITION FREQUENCY;

PHOTODETECTORS;

EID: 0030399150     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.007061     Document Type: Article

References (29)

1. P. Baeri, S. V. Campisano, G. Foti, and E. Rimini, “Arsenic diffusion in silicon by high power nanosecond laser pulsing,” Appl. Phys. Lett. 33, 137-140 (1978).
2. F. Rainer, R. M. Brusasco, J. H. Campbell, F. P. DeMarco, R. P. Gonzales, M. R. Kozlowski, F. P. Milanovich, A. J. Morgan, M. S. Scrivener, M. C. Staggs, I. M. Thomas, S. P. Velsko, and C. R. Wolfe, “Damage measurements on optical materials for use in high peak power lasers,” in Laser-Induced Damage in Optical Materials 1989, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 1438, 74-83 (1990).
3. C. R. Wolfe, M. R. Kozlowski, J. H. Campbell, F. Rainer, A. J. Morgan, and R. P. Gonzales, “Laser conditioning of optical thin films,” in Laser-Induced Damage in Optical Materials 1989, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 1438, 360-375 (1990).
4. A. L. Dawar, P. K. Shishodia, G. Chauhan, A. Kumar, and P. C. Mathur, “Effect of laser irradiation on structural and electrical properties of CdS thin films,” J. Appl. Phys. 67, 6214-6219 (1990).
5. 2 thin films,” J. Mater. Sci. 28, 639-644 (1993).
6. A. L. Dawar, S. Ray, R. P. Mall, and P. C. Mathur, “Effect of laser irradiation on structural, electrical and optical properties of p-mercury cadmium telluride,” J. Appl. Phys. 70, 3516-3520 (1991).
7. S. E. Watkins, C. Z. Zhang, R. M. Walser, and M. F. Becker, “Electrical performance of laser damaged silicon photodiodes,” Appl. Opt. 29, 827-835 (1990).
8. M. F. Becker, C. Z. Zhang, S. E. Watkins, and R. M. Walser, “Laser induced damage to silicon CCD imaging sensors,” in Materials for Optical Switches, Isolators, and Limiters, M. J. Soileau, ed. Proc. SPIE 1105, 68-77 (1989).
9. V. K. Arora and A. L. Dawar, “Effect of laser irradiation on the responsivity of mercury cadmium telluride detectors,” Infrared Phys. Technol. 37, 245-249 (1996).
10. J. O. Porteus, D. L. Decker, J. L. Jernigan, W. N. Faith, and M. Bass, “Evaluation of metal mirrors for high power applications by multithreshold damage analysis,” IEEE J. Quantum Electron. QE-14, 776-782 (1978).
11. T. Whittaker, R. Goedert, and D. Templeton, “Laser induced damage in Schott’s OG-550,” in Laser-Induced Damage in Optical Materials 1989, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, and M. J. Soileau, eds., Proc. SPIE 1438, 88-95 (1990).
12. Y. K. Jhee, M. F. Becker, and R. M. Walser, “Charge emission and precursor accumulation in the multiple pulse damage regime of silicon,” J. Opt. Soc. Am. B 2, 1626-1633 (1985).
13. R. T. Bailey, F. R. Cruickshank, P. Kerkoc, D. Pugh, and J. N. Sherwood, “Surface damage of (-)2-(a-methylbenzylamino)-5-nitropyridine single crystals induced by pulsed laser radiation,” Appl. Opt. 34, 1239-1244 (1995).
14. 2,” J. Appl. Phys. 55, 772-775 (1984).
15. C. Ma, W. Y. Ho, R. M. Walser, and M. F. Becker, “Transient laser induced surface deformation of silicon in relation to damage,” in Laser-Induced Damage in Optical Materials: 1992, H. Bennett, L. Chase, A. Guenter, B. Newnam, and M. J. Soileau, eds., Proc. SPIE 1848, 59-66 (1992).
16. A. Chmel and S. B. Eronko, “Laser induced generation of structural defects in vitreous silica and in activated silicate glass,” J. Non-Cryst. Solids 70, 45-52 (1985).
17. R. M. Wood, R. T. Taylor, and R. L. Rouse, “Laser damage in optical materials at 1.06 p, m,” Opt. Laser Technol. 6, 105-111 (1975).
18. V. Nathan, “Repetitively pulsed laser damage in thin films,” in Laser-Induced Damage in Optical Materials: 1992, H. Bennett, L. Chase, A. Guenter, B. Newnam, and M. J. Soileau, eds., Proc. SPIE 1848, 583-593 (1992).
19. J. R. Meyer, M. R. Kruer, and F. J. Bartoli, “Optical heating in semiconductors: Ge, Si, InSb, and GaAs,” J. Appl. Phys. 51, 5513-5522 (1980).
20. 2 Lasers: Effects and Applications (Academic, New York, 1976), Chap. 4, p. 140.
21. I. G. Kytina and B. E. Kinber, “Fatigue fracture of glasses under laser irradiation conditions,” Sov. J. Quantum Electron. 7, 2427-2431 (1980).
22. S. T. Wu and M. Bass, “Laser induced irreversible absorption changes in alkali halides at 10.6 p, m,” Appl. Phys. Lett. 39, 948-950 (1981).
23. K. M. Dyumaev, A. A. Manekov, A. P. Maslyukov, G. A. Mat-yushin, V. S. Nechitailo, and A. S. Tsaprilov, “Influence of the viscoelastic properties of the matrix and of the plasticizer on the optical strength of transparent polymers,” Sov. J. Quantum Electron. 9, 1318-1323 (1982).
24. 3 laser irradiated single crystals,” Sov. Phys. JETP 83, 1065-1068 (1982).
25. N. Koumvakalis, C. S. Lee, and M. Bass, “Single and multiple pulse catastrophic damage in diamond turned Cu and Ag mirrors at 10.6, 1.06, and 0.532 p, m,” Opt. Eng. 22, 419-423 (1983).
26. 2 under charge injection stress,” J. Appl. Phys. 60, 2024-2035 (1986).
27. 2 studied by charge build up under electron bombardment,” J. Appl. Phys. 57, 5139-5144 (1985).
28. D. Kitriotis and L. D. Merkle, “Multiple pulse laser induced damage phenomena in silicates,” Appl. Opt. 28, 949-958 (1989).
29. M. Bass and H. Barett, “Avalanche breakdown and the probabilistic nature of laser induced damage,” IEEE J. Quantum Electron. QE-8, 338-343 (1972).