Polymeric microstructures technology for future low-cost, high-volume tele-and datacom components

Ericsson Review (English Edition)

Volumn 73, Issue 3, 1996, Pages 98-104

  Palmskog, Göran ^a   Arvidsson, Gunnar ^a   Elderstig, Håkan ^a   Larsson, Olle ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; OPTICAL CABLES; OPTICAL COMMUNICATION EQUIPMENT; OPTICAL FIBER FABRICATION; OPTOELECTRONIC DEVICES; PLASTICS FORMING; SYNTHETIC FIBERS;

POLYMERIC MICROSTRUCTURES TECHNOLOGY;

OPTICAL FIBERS;

EID: 0030398932     PISSN: 00140171     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (10)

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2. Palmskog, G. and Svensson, B-M: Polyimide waveguide and laser diode encapsulation with silicone elastomers. Proc. SPIE Optoelectronic Interconnects II, vol. 2153, pp 259-264, (Conference O/E Lase 94, Los Angeles 1994).
3. Klein, R. and Neyer A., Silicon micromachining for micro-replication technologies, Electr. Letters, vol. 30, No. 20, pp. 1672-1674, 1994.
4. Bhardwaj, J., et al. Advanced Silicon Etching Using High Density Plasmas, Proc. SPIE 1995, pp 224-233, 1995.
5. Engelmann, G., et al. Selectively released microstructures electroplated into thick positve photoresists. J Micromech. Microeng., No.3, p 152, 1994.
6. Heeren, P-H., et al, Microstructuring of silicon by electro-discharge machining (EDM), Conference Eurosensors X, Leuven, Belgium, Sept 8-11, 1996.
7. Wechsung, R., Microstructure Components in Polymers First Industrial Applications, MST News 14/95, 1995.
8. Elderstig H., et al, Low-cost technologies for optical receiver modules. MST Conference Potsdam, Germany, Sept 17-19, 1996.
9. Frazier, A., et al. The Miniaturization Technologies: Past, Present and Future, IEEE Transactions on Industrial Electronics, Vol. 42, No.5, pp423-439, 1995.
10. Ehrfeld, W. and Lehr, H., Deep X-Ray Lithography for the Production of three-dimensional Microstructures from Metals, Polymers and Ceramics. Radiation Physics and Chemistry, Pergamon Press, 1994.