Low temperature deposition of TaCN films using pentakis(diethylamido)tantalum

Materials Research Society Symposium - Proceedings

Volumn 427, Issue , 1996, Pages 349-354

  Jun, Gyu Chang ^a   Cho, Sung Lae ^a   Kim, Ki Bum ^a   Shin, Hyun Koock ^a   Kim, Do Heyoung ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; DIFFUSION IN SOLIDS; ELECTRIC CONDUCTIVITY OF SOLIDS; GRAIN SIZE AND SHAPE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOSTRUCTURED MATERIALS; ORGANOMETALLICS; TANTALUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

DIFFUSION BARRIER; PENTAKIS(DIETHYLAMIDO)TANTALUM (PDEAT); TANTALUM CARBON NITRIDE FILMS;

CONDUCTIVE FILMS;

EID: 0030397699     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-427-349     Document Type: Conference Paper

References (23)