Rapid thermal processing of conventionally and electromagnetically cast 100 cm2 multicrystalline silicon

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 1996, Pages 621-624

  Sivoththaman, S ^a   Laureys, W ^a   De Schepper, P ^a   Nijs, J ^a   Mertens, R ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CASTING; CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; ELECTRIC LAMPS; HYDROGEN; HYDROGENATION; PASSIVATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR PLASMAS; SURFACES;

RAPID THERMAL DIFFUSION; RAPID THERMAL OXIDATION; RAPID THERMAL PROCESSING; SYSTEMATIC LIFETIME MEASUREMENT; TUNGSTEN HALOGEN LAMP;

SOLAR CELLS;

EID: 0030397234     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)