Characterizing surfaces and overlying multilayer structures using grazing incidence x-ray reflectivity

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 219-224

  J Pedulla, Joseph ^a   Deslattes, Richard D ^a   Joensen, Karsten D ^a   Gorenstein, Paul ^a  

^a Pedulla & Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATED MATERIALS; COATINGS; FUSED SILICA; GOLD; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MULTILAYERS; SPUTTER DEPOSITION; TELESCOPES; X RAY ANALYSIS; X RAY APPARATUS;

GOLD COATINGS; GRAZING INCIDENCE X RAY REFLECTIVITY; HARD X RAY TELESCOPE; ION BEAM SPUTTERING;

SURFACE STRUCTURE;

EID: 0030396888     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)