Microstructural characterization of platinum films grown by MOCVD

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 27-32

  Vellaikal, M ^a   Streiffer, S K ^a   Woolcott Jr , R R ^a   Kingon, A I ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY MEASUREMENT; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; OXYGEN; PLATINUM; PLATINUM COMPOUNDS; SURFACE ROUGHNESS; THIN FILMS;

ACETYLACETONE; HEXAFLUOROACETYLACETONATE; HILLOCK FORMATION; PLATINUM FILMS; PREFERRED ORIENTATION;

FILM GROWTH;

EID: 0030396882     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)