Investigation of elemental distributions in TiAlN-ZrN multi-layers using analytical transmission electron microscopy

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 357-363

  Cawley, J ^a   Titchmarsh, J M ^a   Donohue, L A ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

Analytical transmission electron microscopy; Elemental distributions; Tialn zrn multi layers

Indexed keywords

COMPOSITION; CRYSTALLOGRAPHY; EVAPORATION; FILM GROWTH; MAGNETRON SPUTTERING; MICROSTRUCTURE; NITRIDES; PROTECTIVE COATINGS; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

ELEMENTAL DISTRIBUTION; ENERGY DISPERSIVE X RAY ANALYSIS; ENERGY LOSS SPECTROSCOPY; FIELD EMISSION GUN SCANNING TRANSMISSION MICROSCOPE; TITANIUM ALUMINUM NITRIDE; ZIRCONIUM NITRIDE;

MULTILAYERS;

EID: 0030396810     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03046-0     Document Type: Article

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