Evaluating the environment, safety and health impacts of semiconductor manufacturing at the design and process development stages

Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 1996, Pages 232-236

  Lashbrook, Wes ^a   O'Hara, Patricia ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCIDENT PREVENTION; COST EFFECTIVENESS; ENVIRONMENTAL IMPACT; HEALTH HAZARDS; MATHEMATICAL MODELS;

BYPRODUCT MASS DETERMINATION; COSTING MODELS; DESIGN FOR THE ENVIRONMENT HEALTH AND SAFETY (DFESH);

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030396307     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)